Sensitive force sensors have a low bandwidth they said...
The SiliForce 101
The SILIFORCE 101 uses mechanical amplification to achieve both high sensitivity and a high bandwidth. Its miniature 4 mm by 3 mm die enables force measurements up to 13 mN with a bandwidth of 75 kHz.
Electronic interfacing of this unique force sensor is quite simple. The resistive readout structures are in Wheatstone bridge configuration and show a high sensitivity and accuracy with respect to the applied force.
SPECIFICATIONS
| Axes | |
| Degrees of freedom | 1 |
| Force axis | In-plane |
| Dimensions | |
| Width (perpendicular to force) | 4 mm |
| Length (parallel to force) | 3 mm |
| Thickness | 0.43 mm |
| Static | |
| Full range | 13 mN |
| Sensitivity | 1.46 /N |
| Linearity (R²) | >0.9999 |
| Accuracy | 100 μN |
| Dynamic | |
| Resonance frequency (first mode) | 75 kHz |
PATENTS AND SCIENTIFIC PUBLICATIONS
- Alveringh, D., Van Der Ven, D. L., Veltkamp, H. W., Batenburg, K. M., Sanders, R. G., Rivas, D. F., & Wiegerink, R. J. (2022, January). Miniature Robust High-Bandwidth Force Sensor with Mechanically Amplified Piezoresistive Readout. In 2022 IEEE 35th International Conference on Micro Electro Mechanical Systems Conference (MEMS) (pp. 684-687). IEEE.